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LISTING DETAILS
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Industry >
Machinery Equipment |
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Sell Tegal 901e Plasma Etching Semiconductor Equipment from Allwin21 Corp. |
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Description:
peterchen@allwin21.com
http://www.allwin21.com Phone: 001-408-988-5188 Peter Chen
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Plasma Etch/Asher/Descum Semiconductor Equipments (1)Upgraded Matrix 105 (2)Upgraded Matrix 205 (3)Upgraded Matrix 303 (4)Upgraded Matrix 403(5)Upgraded Tegal 901 (6)Upgraded Tegal 903 (7)Upgraded Tegal 901e(8)Upgraded Tegal 903e(9)Upgraded Gasonics AE 2001 (10)Upgraded Gasonics Aura 1000 (11)Upgraded Gasonics Aura 3010 (12)Upgraded Gasonics PEP 3510 (13)Upgraded Branson IPC 3000 PECVD/RIE/ICP.(1)STS 310 (2)STS 320 (3)Plasma Thermal 700 720 (4)Plasma Thermal 790
Tegal 900 series Plasma/RIE etch System are used by the Semiconductor Industry for integrated circuit fabrication. The system are used in one part of the sequence of manufacturing steps that transfer a pattern formed from a layer of photosensitive material, the photoresist, to a layer that makes up a permanent part of the final device. The process of defining a pattern with photoresist known as photolithography, while the etch process transfers the photoresist pattern to the permanent layer.The 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture semiconductor, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads.
Upgraded Tegal 901e system is designed around a production-proven wafer transport design that can accommodate 75 mm to 150 mm round silicon, GaAs, InP, and dielectric material substrates. The transport can also be configured to accommodate rectangular substrates up to 125 mm on a side.
Combined with Allwin21 Corp Superior Temperature Control Technologyand AW Control Software, upgraded Tegal901e provides significant advantages over the original systems.
Single Wafer, Multi-Step? Processing Closed-Loop Temperature Control Pressure Control Accurate, closed-loop pressure control with “butterfly-style” throttle valve and capacitance manometer New hardware includes: New control Board with cable,new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse.
Software calibration and easy to be done. More functions and I/O hardware “exposed” for easier maintenance and trouble shooting. It is easy to edit recipe with GUI and graph display. Save all process data on the computer hard disk. A/D and D/A precision is 14 to 16 bits. Detect in process and with color curve displayed on thescreen. Robot teach is on the GUI and easy to do the procedure with new? concept teaching method. Software watch dog to eliminate machine damage duo to the computer locks up or freeze. Sensor status detect function. On line help function Better performance and maintenance than the origina lsystems
Upgraded Tegal 901e Applications nitride etch, photoresist Descum, polyimide and BCB etches, zero layer etch, backside etch, isotropic oxide etch, non-critical polysilicon etch Titanium/tantalum alloy etch.
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Allwin21 Corp. focus on the following tools Semiconductor Equipments :
Rapid Thermal Process/Annealing:
(1)Upgraded AG 210 (2)Upgraded AG 410 (3)Upgraded AG 610(AccuThermo AW 610).
(4)Upgraded AG 4100 (5)Upgraded AG 4100S (6)Upgraded AG 4108 (7)Upgraded AG 8108
(8)Upgraded AG 8800
Plasma Etch/Asher/Descum:
(1)Upgraded Matrix 105 (2)Upgraded Matrix 205 (3)Upgraded Matrix 303 (4)Upgraded Matrix 403(5)Upgraded Tegal 901 (6)Upgraded Tegal 903 (7)Upgraded Tegal 901e(8)Upgraded Tegal 903e (9)Upgraded Gasonics AE 2001 (10)Upgraded Gasonics Aura 1000 (11)Upgraded Gasonics Aura 3010 (12)Upgraded Gasonics PEP 3510 (13)Upgraded Branson IPC 3000
PECVD/RIE/ICP:
(1)STS 310 (2)STS 320 (3)Plasma Thermal 700 720 (4)Plasma Thermal 790
Probe/Tester:
(1)EG 1034 (2)EG 2001 (3)EG 2010 (4)HP 4062 (5)HP 4145B (6)HP 4142B (7)HP 4155
(8)HP 4084B (9)HP 4085B
http://www.allwin21.com
peterchen@allwin21.com Phone: 001-408-988-5188 Peter Chen
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Location: |
Santa Clara, California, USA |
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Contact
Person:
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yanhongtan |
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Phone: |
001-408-988-5188 |
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