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LISTING DETAILS
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Industry >
Machinery Equipment |
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Sell Upgraded AG Heatpulse 4100 RTA RTP from Allwin21 Corp |
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http://www.allwin21.com
peterchen@allwin21.com Phone: 001-408-988-5188 Peter Chen
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Rapid Thermal Process/Annealing Semiconductor Equipments
(1)Upgraded AG 210 (2)Upgraded AG 410 (3)Upgraded AG 610(AccuThermo AW 610).
(4)Upgraded AG 4100 (5)Upgraded AG 4100S (6)Upgraded AG 4108 (7)Upgraded AG 8108
(8)Upgraded AG 8800
AG Heatpulse 4100 Series are single-wafer, cassette-to-cassette rapid thermal processors, capable of processing in inert or corrosive ambient. The unit is built for the production environment. AG4100 is a rapid thermal processor which uses high-intensity, visible radiation to heat single wafer for short periods at precisely controlled temperatures. These capabilities, combined with the heating chamber's cold-wall design, superior heating uniformity, AW Control Software and Superior Temperature Control Technology, provide significant advantages over conventional furnace processing and conventional RTP systems
Upgraded AG Associates Heatpulse 4100’s key features include:
? Wafer Size 4”, 5” and 6” without change any hardware and software.
? Robot control ability. (Equip Tech. robot with one arm)
? Single Wafer Process.
? Gold coated aluminum chamber with water cooling
? Radiation heating lamp module
? 4-gas channel with 4 MFCs
? Cassette to cassette wafer handling
? Precise Temperature/Time control, Temperature measuring precision ? 1?C.
? Multiple cycle processing capability
? Steady Temp Range: 600?C to 1250?C for pyrometer sensor, 100?C to 600?C for Thermocouple.
? Steady state process time 0 to 30000 sec programmable.
? Temp Ramp-up Speed: 10?C to 120?C for wafer. Programmable
? Ramp down speed 10?C - 150?C for wafer
? Robot wafer cycling: 80 Wafers/Hr.
? New hardware includes: three interface cards with cable, new timer counter with watch dog, Pentium Computer with 17” LCD Monitor, standard keyboard and mouse.
? Software calibration and easy to be done.
? More functions and I/O hardware “exposed” for easier maintenance and trouble shooting.
? It is easy to edit recipe with GUI and graph display.
? Save all process data on the computer hard disk.
? A/D and D/A precision is 14 to 16 bits.
? Detect in process and with color curve displayed on the screen.
? Robot teach is on the GUI and easy to do the procedure with new concept teaching method.
? Lamp damage detect in process.
? Software watch dog to eliminate machine damage duo to the computer locks up or freeze.
? Sensor status detect function.
? On line help function.
? High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies.
? Consistent wafer-to-wafer process cycle repeatability.
? Elimination of external contamination.
? Small footprint and energy efficiency.
Allwin21 Corp. focus on the following tools Semiconductor Equipments :
Rapid Thermal Process/Annealing:
(1)Upgraded AG 210 (2)Upgraded AG 410 (3)Upgraded AG 610(AccuThermo AW 610).
(4)Upgraded AG 4100 (5)Upgraded AG 4100S (6)Upgraded AG 4108 (7)Upgraded AG 8108
(8)Upgraded AG 8800
Plasma Etch/Asher/Descum:
(2) Upgraded Matrix 105 (2)Upgraded Matrix 205 (3)Upgraded Matrix 303 (4)Upgraded Matrix 403(5)Upgraded Tegal 901 (6)Upgraded Tegal 903 (7)Upgraded Tegal 901e(8)Upgraded Tegal 903e (9)Upgraded Gasonics AE 2001 (10)Upgraded Gasonics Aura 1000 (11)Upgraded Gasonics Aura 3010 (12)Upgraded Gasonics PEP 3510 (13)Upgraded Branson IPC 3000
PECVD/RIE/ICP:
(1)STS 310 (2)STS 320 (3)Plasma Thermal 700 720 (4)Plasma Thermal 790
Probe/Tester:
(1)EG 1034 (2)EG 2001 (3)EG 2010 (4)HP 4062 (5)HP 4145B (6)HP 4142B (7)HP 4155
(8)HP 4084B (9)HP 4085B
http://www.allwin21.com
peterchen@allwin21.com Phone: 001-408-988-5188
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Location: |
Santa Clara, California, USA |
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Contact
Person:
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yanhongtan |
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Phone: |
001-408-988-5188 |
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